Mass Flow Controller 1479A - Fair Condition

MKS 1479A Mass-Flo Controller: a high-performance, reliable mass flow controller

The MKS 1479A is a mass flow controller specially designed to accurately measure and regulate gas flow in a variety of industrial and scientific applications. Its fully metal, hermetically sealed design eliminates the sealing problems often encountered with elastomer seals, ensuring low permeation and excellent cleanliness.

Featuring sensor technology combined with optimised valve control electronics, the 1479A offers fast response to setpoints, enabling effective control even over very low flow ranges. Its design incorporates a bypass element in parallel with a sensor tube to ensure accurate mass flow indication, while maintaining high stability against temperature and altitude variations.

The device is also equipped with shielding against radio frequency and electromagnetic interference, making it compatible with electrically noisy environments. It is certified to comply with EMC Directive 89/336/EEC, ensuring reliable performance in complex installations. The controller can be configured with several types of fittings and connectors to suit the specific requirements of each application.

Designed to work in conjunction with other MKS equipment, such as power supplies and readout units, the 1479A can be integrated into complete systems for display, power supply and setpoint generation. Its compatibility with various devices and compact dimensions (three-inch footprint) make it easy to integrate into confined spaces.

The MKS 1479A is ideal for laboratories, semiconductor facilities, vacuum processes and other applications where accuracy and reliability are essential. Its design ensures low particle generation and low outgassing, making this controller suitable for clean environments and critical applications.

• Accuracy: ±1% of full scale
• Flow ranges (N2 equivalent): 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10,000, 20,000 sccm
• Repeatability: ±0.2% of full scale
• Measurement resolution: 0.1% of full scale
• Stabilisation time: less than 2 seconds
• Operating temperature: 0 °C to 50 °C
• Maximum inlet pressure: 250 psig
• Operating differential pressure: 10 to 40 psid (≤ 5000 sccm), 15 to 40 psid (10,000 and 20,000 sccm)
• Power supply: ±15 VDC (±5%) @ 200 mA (start-up)
• Pressure coefficient: 0.02% reading/psi
• Warm-up time: 2 minutes to reach a stable state
• CE compatibility: compliant with EMC Directive 89/336/EEC